JPH0554883B2 - - Google Patents
Info
- Publication number
- JPH0554883B2 JPH0554883B2 JP25627386A JP25627386A JPH0554883B2 JP H0554883 B2 JPH0554883 B2 JP H0554883B2 JP 25627386 A JP25627386 A JP 25627386A JP 25627386 A JP25627386 A JP 25627386A JP H0554883 B2 JPH0554883 B2 JP H0554883B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- grating
- image
- measured
- flatness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000011295 pitch Substances 0.000 claims description 34
- 238000009434 installation Methods 0.000 claims description 25
- 238000006243 chemical reaction Methods 0.000 claims description 16
- 238000003384 imaging method Methods 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 2
- 238000005259 measurement Methods 0.000 description 18
- 238000010586 diagram Methods 0.000 description 13
- 125000006850 spacer group Chemical group 0.000 description 7
- 239000003973 paint Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000005338 frosted glass Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011022 opal Substances 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25627386A JPS63109309A (ja) | 1986-10-28 | 1986-10-28 | 非接触式平坦度測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25627386A JPS63109309A (ja) | 1986-10-28 | 1986-10-28 | 非接触式平坦度測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63109309A JPS63109309A (ja) | 1988-05-14 |
| JPH0554883B2 true JPH0554883B2 (en]) | 1993-08-13 |
Family
ID=17290353
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25627386A Granted JPS63109309A (ja) | 1986-10-28 | 1986-10-28 | 非接触式平坦度測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63109309A (en]) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0451610U (en]) * | 1990-09-07 | 1992-04-30 | ||
| JP4160434B2 (ja) * | 2003-03-31 | 2008-10-01 | 財団法人鉄道総合技術研究所 | 画像読取装置 |
| EP3561447B1 (en) | 2017-01-25 | 2023-11-22 | National Institute of Advanced Industrial Science and Technology | Image processing method |
| JP7707847B2 (ja) * | 2021-10-15 | 2025-07-15 | 大日本印刷株式会社 | 表面性状測定装置および表面性状測定方法 |
-
1986
- 1986-10-28 JP JP25627386A patent/JPS63109309A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63109309A (ja) | 1988-05-14 |
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